Gonidec, MathieuHamedi, Mahiar M.Nemiroski, AlexRubio, Luis M.Torres, CesarWhitesides, George2017-01-132016Gonidec, Mathieu, Mahiar M. Hamedi, Alex Nemiroski, Luis M. Rubio, Cesar Torres, and George M. Whitesides. 2016. Fabrication of Nonperiodic Metasurfaces by Microlens Projection Lithography. Nano Letters 16, no. 7: 4125–4132. doi:10.1021/acs.nanolett.6b00952.1530-6984http://nrs.harvard.edu/urn-3:HUL.InstRepos:29955476This paper describes a strategy that uses template-directed self-assembly of µm-scale microspheres to fabricate arrays of microlenses for projection photolithography of periodic, quasiperiodic, and aperiodic infrared metasurfaces. This method of “template-encoded microlens projection lithography” (TEMPL) enables rapid prototyping of planar, multi-scale patterns of similarly shaped structures with critical dimensions down to ~ 400 nm. Each of these structures is defined by local projection lithography, with a single microsphere acting as a lens. This paper explores the use of TEMPL for the fabrication of a broad range of two-dimensional lattices with varying types of non-periodic spatial distribution. The matching optical spectra of the fabricated and simulated metasurfaces confirm that TEMPL can produce structures that conform to expected optical behavior.en-USJournal Article2017-01-1120162017-01-1310.1021/acs.nanolett.6b00952