Narrow features in metals at the interfaces between different etch resists

Sundar, Vikram C.Aizenberg, Joanna2023-01-252003-09-15Sundar, Vikram C., Joanna Aizenberg. "Narrow features in metals at the interfaces between different etch resists." Appl. Phys. Lett. 83, no. 11 (2003): 2259-2261. DOI: 10.1063/1.16116400003-69511077-3118https://nrs.harvard.edu/URN-3:HUL.INSTREPOS:37374114en-USPhysics and Astronomy (miscellaneous)Narrow features in metals at the interfaces between different etch resistsJournal Article2018-05-1720032023-01-2510.1063/1.1611640