Ultraviolet lithography of self-assembled monolayers for submicron patterned deposition

Friebel, SusanneAizenberg, JoannaAbad, SilviaWiltzius, Pierre2023-01-252000-10-09Joanna Aizenberg. Ultraviolet Lithography of Self-Assembled Monolayers for Submicron Patterned Deposition. Appl. Phys. Lett., 2000.0003-69511077-3118https://nrs.harvard.edu/URN-3:HUL.INSTREPOS:37374115en-USPhysics and Astronomy (miscellaneous)Ultraviolet lithography of self-assembled monolayers for submicron patterned depositionJournal Article2018-05-1720002023-01-2510.1063/1.1316066