Zhang, XuanHu, Evelyn2017-10-032016Zhang, X., and E. L. Hu. 2016. “Templated Growth of Diamond Optical Resonators via Plasma-Enhanced Chemical Vapor Deposition.” Applied Physics Letters 109 (8) (August 22): 081101. doi:10.1063/1.4961536.0003-6951http://nrs.harvard.edu/urn-3:HUL.InstRepos:33980565We utilize plasma-enhanced chemical vapor deposition through a patterned silica mask for templated diamond growth to create optical resonators. The pyramid-shaped structures have quality factors Q up to 600, measured using confocal photoluminescence spectroscopy, and mode volumes V as small as 2.5(λ/n)32.5(λ/n)3 for resonances at wavelengths λ between 550 and 650 nm, and refractive index n, obtained using finite-difference time-domain simulations. Bright luminescence from nitrogen-vacancy and silicon-vacancy centers in the grown diamond is observed. The resonator design and fabrication technique obviates any etching of diamond, which preserves emitter properties in a pristine host lattice.en-USJournal Article2017-10-0310.1063/1.4961536