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    • Failure Analysis of Electronic Material Using Cryogenic FIB-SEM 

      Antoniou, Nicholas; Graham, Adam; Hartfield, Cheryl; Amador, Gonzalo (ASM International, 2012)
      Two-beam systems (focused ion beam (FIB) integrated with a scanning electron microscope (SEM)) have enabled site-specific analysis at the nano-scale through in situ "mill and view" capability at high resolution. In addition, ...