Show simple item record

ALD of Manganese Silicate

dc.contributor.authorGordon, Roy Gerald
dc.contributor.authorSun, Lu
dc.contributor.authorChen, Qiang
dc.contributor.authorPark, Jin-Seong
dc.contributor.authorKim, Sang Bok
dc.date.accessioned2017-11-03T19:47:57Z
dc.date.issued2015
dc.identifierQuick submit: 2016-03-08T12:28:31-0500
dc.identifier.citationGordon, Roy G., Lu Sun, Qiang Chen, Jin-Seong Park, Sang Bok Kim. 2015. ALD of Manganese Silicate. In Proceedings of the AVS Atomic Layer Deposition Conference, Portland, Oregon, June 28 - July 1.en_US
dc.identifier.urihttp://nrs.harvard.edu/urn-3:HUL.InstRepos:34325478
dc.description.sponsorshipChemistry and Chemical Biologyen_US
dc.language.isoen_USen_US
dash.licenseOAP
dc.titleALD of Manganese Silicateen_US
dc.typeConference Paperen_US
dc.date.updated2016-03-08T17:28:34Z
dc.description.versionAccepted Manuscripten_US
dash.depositing.authorGordon, Roy Gerald
dc.date.available2015
dc.date.available2017-11-03T19:47:57Z
dash.contributor.affiliatedSun, Lu
dash.contributor.affiliatedKim, Sang Bok
dash.contributor.affiliatedChen, Qian
dash.contributor.affiliatedGordon, Roy


Files in this item

Thumbnail
Name:
DASH_ALD_of_Manganese_Silicate.pdf
Size:
1.599Mb
Format:
PDF
View/Open

This item appears in the following Collection(s)

Show simple item record