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Lin, Y
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Lin, Y
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Lin
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Lin, Y
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search.filters.author.Cohen, S.
search.filters.author.Flaitz, P.
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search.filters.author.Canaperi, D.
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search.filters.author.Gordon, Roy
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search.filters.author.Grill, A.
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2015
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Author's Publications: search.filters.isAuthorOfPublication.58dfb18a-8ab4-4583-a67b-69615222c431
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Author: search.filters.author.Cohen, S.
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Author: search.filters.author.Flaitz, P.
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Start date: 2015
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Publication
Selective manganese deposition for CU_low k nano device interconnect
(
2015
)
Nguyen, Son
;
Vo, T.
;
Priyadarshini, D.
;
Haigh, T.
;
Nogami, T.
;
Cohen, S.
;
Flaitz, P.
;
Lin, Y
;
Shobha, H.
;
Grill, A.
;
Canaperi, D.
;
Gordon, Roy
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