(American Association for the Advancement of Science (AAAS), 2020-05-21) Sun, Wei; Shen, Jie; Zhao, Zhao; Arellano, Noel; Rettner, Charles; Tang, Jianshi; Cao, Tianyang; Zhou, Zhiyu; Ta, Toan; Streit, Jason K.; Fagan, Jeffrey A.; Schaus, Thomas; Zheng, Ming; Han, Shu-Jen; Shih, William; Maune, Hareem T.; Yin, Peng
Precise fabrication of semiconducting carbon nanotubes (CNTs) into densely-aligned evenly-spaced arrays is required for the ultra-scaled technology nodes. We report the precise scaling of inter-CNT pitch using a supramolecular assembly method called spatially hindered integration of nanotube electronics (SHINE). Specifically, by using DNA brick crystal based nanotrenches to align DNA-wrapped CNTs through DNA hybridization, we constructed parallel CNT arrays with uniform pitch as small as 10.4 nanometers, at an angular deviation less than 2 degrees and an assembly yield > 95%.
