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Pressure-Enhanced Crystallization Kinetics of Amorphous Si and Ge: Implications for Point-Defect Mechanisms

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1991

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American Institute of Physics
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Lu, Guo-Quan, Eric Nygren and Michael J. Aziz. 1991. Pressure-enhanced crystallization kinetics of amorphous Si and Ge: Implications for point-defect mechanisms. Journal of Applied Physics 70: 5323-5345.

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Abstract

The effects of hydrostatic pressure on the solid phase epitaxial growth (SPEG) rate, v, of intrinsic Ge (100) and undoped and doped Si (100) into their respective self-implanted amorphous phases are reported. Samples were annealed in a high-temperature, high-pressure diamond anvil cell. Cryogenically-loaded fluid Ar,used as the pressure transmission medium, ensured a clean and hydrostatic environment.

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