Nanometer-thin solid-state nanopores by cold ion beam sculpting

Abstract

Recent work on protein nanopores indicates that single molecule characterization (including DNA sequencing) is possible when the length of the nanopore constriction is about a nanometer. Solid-state nanopores offer advantages in stability and tunability, but a scalable method for creating nanometer-thin solid-state pores has yet to be demonstrated. Here we demonstrate that solid-state nanopores with nanometer-thin constrictions can be produced by “cold ion beam sculpting,” an original method that is broadly applicable to many materials, is easily scalable, and requires only modest instrumentation.