Publication: X-ray standing wave analysis for bromine chemisorbed on silicon
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Date
1982
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Publisher
American Vacuum Society
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Citation
Bedzyk, M.J., Gibson, W.M., Golovchenko, A. 1982. X-Ray Standing Wave Analysis for Bromine Chemisorbed on Silicon. Journal of Vacuum Science and Technology 20, no. 3: 634-637. doi:10.1116/1.571412.
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Abstract
X‐ray standing wave measurements on single crystals of silicon are used to determine the coverage and position of chemisorbed bromine. Detailed analysis of the position information leads to the conclusion that silicon surface atoms bonded to adsorbed bromine atoms are in extrapolated bulk‐line positions. Direct measurement of the desorption of correlated bromine in air demonstrates the high stability of the Br/Si surface interface.
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Keywords
silicon, desorption, single crystals
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