Publication: High quality crystalline YBa2Cu3O7−δ films on thin silicon substrates
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Date
1994
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AIP Publishing
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Citation
Haakenaasen, R., D. K. Fork, and J. A. Golovchenko. 1994. High quality crystalline YBa2Cu3O7−δ films on thin silicon substrates. Applied Physics Letters 64, no. 12: 1573. doi:10.1063/1.111843.
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Abstract
YBa2Cu3O7−δ(001) (YBCO)films with near perfect crystallinity have been grown epitaxially on Si(100) using two intermediate buffer layers: Yttrium‐stabilized zirconia (YSZ) and CeO2. All layers were grown by an in situpulsed laser deposition process. The new films have Rutherford backscattering spectroscopy minimum yields as low as 5%, compared to 12% for YBCOfilms deposited directly on YSZ. The superconducting onset is above 90 K with a transition width ΔT of 1 K. After film deposition the Si substrate could be etched from the back to give a circular, 2‐mm‐ diam, 4000 Å uniformly thick Si membrane with 300 Å YSZ, 80 Å CeO2, and 1500–3000 Å YBCO on top.
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Keywords
thin films, superconducting films, thin film deposition, buffer layers, copper
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