Publication: Maskless photolithography: Embossed photoresist as its own optical element
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1998-11-16
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AIP Publishing
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Paul, Kateri E., Tricia L. Breen, Joanna Aizenberg, George Whitesides. "Maskless photolithography: Embossed photoresist as its own optical element." Appl. Phys. Lett. 73, no. 20 (1998): 2893-2895. DOI: 10.1063/1.122621
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Physics and Astronomy (miscellaneous)
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