Publication: Templated growth of diamond optical resonators via plasma-enhanced chemical vapor deposition
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Date
2016
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AIP Publishing
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Zhang, X., and E. L. Hu. 2016. “Templated Growth of Diamond Optical Resonators via Plasma-Enhanced Chemical Vapor Deposition.” Applied Physics Letters 109 (8) (August 22): 081101. doi:10.1063/1.4961536.
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Abstract
We utilize plasma-enhanced chemical vapor deposition through a patterned silica mask for templated diamond growth to create optical resonators. The pyramid-shaped structures have quality factors Q up to 600, measured using confocal photoluminescence spectroscopy, and mode volumes V as small as 2.5(λ/n)32.5(λ/n)3 for resonances at wavelengths λ between 550 and 650 nm, and refractive index n, obtained using finite-difference time-domain simulations. Bright luminescence from nitrogen-vacancy and silicon-vacancy centers in the grown diamond is observed. The resonator design and fabrication technique obviates any etching of diamond, which preserves emitter properties in a pristine host lattice.
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