Publication: Suppression of ion-implantation induced porosity in germanium by a silicon dioxide capping layer
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2016-08-22
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AIP Publishing
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Tran, Tuan, Huda Alkhaldi, Hemi Gandhi, David Pastor, Larissa Huston, Jennifer Wong-Leung, Michael Aziz et al. "Suppression of ion-implantation induced porosity in germanium by a silicon dioxide capping layer." Appl. Phys. Lett. 109, no. 8 (2016): 082106. DOI: 10.1063/1.4961620
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Physics and Astronomy (miscellaneous)
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