Publication: ALD of Manganese Silicate
Open/View Files
Date
2015
Published Version
Published Version
Journal Title
Journal ISSN
Volume Title
Publisher
The Harvard community has made this article openly available. Please share how this access benefits you.
Citation
Gordon, Roy G., Lu Sun, Qiang Chen, Jin-Seong Park, Sang Bok Kim. 2015. ALD of Manganese Silicate. In Proceedings of the AVS Atomic Layer Deposition Conference, Portland, Oregon, June 28 - July 1.
Research Data
Abstract
Description
Other Available Sources
Keywords
Terms of Use
This article is made available under the terms and conditions applicable to Open Access Policy Articles (OAP), as set forth at Terms of Service