Browsing FAS Scholarly Articles by Keyword "GaN"
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ALD Growth of MgxCa1xO on GaN and Its Band Offset Analysis
(American Chemical Society (ACS), 2021-02-08)Atomic layer deposition (ALD) processes were developed for growing MgO and CaO on GaN substrates using a home-built ALD reactor with amidinate-based precursors. An optimal deposition condition was then determined to deposit ... -
Epitaxial Growth of MgxCa1–xO on GaN by Atomic Layer Deposition
(American Chemical Society (ACS), 2016)We demonstrate for the first time that a singlecrystalline epitaxial MgxCa1−xO film can be deposited on gallium nitride (GaN) by atomic layer deposition (ALD). By adjusting the ratio between the amounts of Mg and Ca in the ...