Browsing FAS Scholarly Articles by Keyword "O2 exposure"
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Atomic Layer Deposition of Ruthenium Thin Films From an Amidinate Precursor
(John Wiley & Sons, 2009-10-14)Ruthenium thin films were deposited by atomic layer deposition from bis(N,N’-di-tert-butylacetamidinato)ruthenium(II) dicarbonyl and O2. Highly conductive, dense and pure thin films can be deposited when oxygen exposure ...